A method and structure for a printhead including a plurality of electrostatic actuators may include the formation of a first conductive layer, a first dielectric layer over the first conductive layer, and a second dielectric layer over the first dielectric layer. The first and second dielectric layers may be patterned to expose the first conductive layer, then sidewalls of the first dielectric layer may be isotropically etched to recess the sidewalls under the second dielectric layer. A self-patterned second conductive layer may be formed to include a first portion that forms at least a portion of an actuator electrode and physically and electrically contacts the first conductive layer, and a second portion that physically contacts the second dielectric layer. An actuator membrane may be diffusion bonded to the second dielectric layer using the second portion of the second conductive layer.
