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Acoustic wave receiving apparatus
专利权人:
Yasufumi Asao
发明人:
Yasufumi Asao,Takao Nakajima
申请号:
US14115970
公开号:
US09366564B2
申请日:
2012.05.23
申请国别(地区):
US
年份:
2016
代理人:
摘要:
Use of an acoustic wave receiving apparatus which includes: a resonator including a first mirror on which measurement light is incident, a second mirror which is arranged to face the first mirror and on which acoustic waves from an object are incident, an acoustic wave reception layer interposed between the first mirror and the second mirror, and a compensation layer and a detector for detecting a variation in an optical path length between the first mirror and the second mirror that occurs in response to deformation of the acoustic wave reception layer caused by incidence of the acoustic waves, wherein the variation in the optical path length due to a film thickness distribution of the acoustic wave reception layer is compensated by refraction in the compensation layer.
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