The present invention is an electrode array (5) for generating non-thermal plasma, and includes a first electrode (7) and a second electrode (9). Said 1st electrode (7) and said 2nd electrode (9) are related with the electrode row line column (5) electrically insulated mutually by the dielectric element (11), and mutually spaced apart. The first electrode (7) has a minimum thickness of 10 μm when viewed in a direction in which the electrodes (7, 9) are separated from each other, and the second electrode (9) is formed of the electrodes (7, 9). ) Have a minimum thickness of 1 μm to a maximum of 5 μm or a minimum thickness of 5 μm to a maximum of 30 μm, and the dielectric element 11 has a minimum thickness of 10 μm to a maximum of 250 μm. . [Selection] Figure 1本発明は、非熱プラズマを生成するための電極列（５）であって、第一電極（７）及び第二電極（９）を備える。前記第一電極（７）及び前記第二電極（９）は、誘電体素子（１１）によって相互に電気的に絶縁され、相互に離間されている電極列（５）に関する。前記第一電極（７）は、前記電極（７、９）が相互に離間する方向に見て、最小１０μｍの厚さを有し、前記第二電極（９）は、前記電極（７、９）が相互に離間する方向に見て、最小１μｍ乃至最大５μｍの厚さ又は最小５μｍ乃至最大３０μｍの厚さを有し、前記誘電体素子（１１）は最小１０μｍ乃至最大２５０μｍの厚さを有する。【選択図】図１
