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WAVEFRONT MEASURING APPARATUS, WAVEFRONT MEASURING METHOD, AND COMPUTER-READABLE MEDIUM STORING PROGRAM
专利权人:
Takeshi Kondoh
发明人:
Takeshi Kondoh
申请号:
US13561824
公开号:
US20130032727A1
申请日:
2012.07.30
申请国别(地区):
US
年份:
2013
代理人:
摘要:
A wavefront measuring apparatus includes an optical element forming a periodic pattern by light, a detector having pixels to detect the light, and a computer computing, based on detection results of the detector, wavefront information at positions in a wavefront of the light transmitted through or reflected by a specimen. The detector detects a first periodic pattern formed by the light, and a second periodic pattern formed by the light and shifted in phase from the first periodic pattern. The computer computes the wavefront information at one of the positions by using a result detected in a first pixel of the pixels when detecting the first periodic pattern, a result detected in a second pixel of the pixels when detecting the first periodic pattern, the second pixel being positioned within three pixels from the first pixel, and a result detected in the first pixel when detecting the second periodic pattern.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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