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Controlling the uniformity of PECVD deposition
专利权人:
SIO2 MEDICAL PRODUCTS; INC.
发明人:
Christopher Weikart,Becky L. Clark,Adam Stevenson,Robert S. Abrams,John Belfance
申请号:
US14085749
公开号:
US09764093B2
申请日:
2013.11.20
申请国别(地区):
US
年份:
2017
代理人:
摘要:
A method and apparatus for plasma modifying a workpiece such as a syringe barrel, cartridge barrel, vial, or blood tube is described. Plasma is provided within the lumen of the workpiece. The plasma is provided under conditions effective for plasma modification of a surface of the workpiece. A magnetic field is provided in at least a portion of the lumen. The magnetic field has an orientation and field strength effective to improve the uniformity of plasma modification of the interior surface of the generally cylindrical wall. A vessel made according to the process or using the apparatus described above. A pharmaceutical package comprising the syringe barrel or vial containing a pharmaceutical preparation, secured with a closure.
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