PROBLEM TO BE SOLVED: To provide an ultrasonic element array that can have higher resistance against moisture and voltage even in a layout where wires intersect.SOLUTION: An ultrasonic element array 1 includes: a first piezoelectric element 3, a second piezoelectric element 4, a third piezoelectric element 5, and a fourth piezoelectric element 6 in each of which a piezoelectric body 16 is held between a first electrode 12 and a second electrode 13； a first wire 8 connecting between the second electrode 13 of the first piezoelectric element 3 and the second electrode 13 of the second piezoelectric element 4； a second wire 9 connecting between the second electrode 13 of the third piezoelectric element 5 and the second electrode 13 of the fourth piezoelectric element 6； a third wire 10b connecting to the second wire 9 over the first wire 8； and an insulating film 21 positioned between the first wire 8 and the third wire 10b. The insulating film 21 includes an inorganic insulating film 7 formed of an inorganic substance and an organic insulating film 18 formed of an organic substance. The inorganic insulating film 7 covers the piezoelectric elements.SELECTED DRAWING: Figure 1【課題】配線が交差するレイアウトであっても水分及び電圧に対して耐性を高くすることができる超音波素子アレイを提供する。【解決手段】超音波素子アレイ１は第１電極１２と第２電極１３とに圧電体１６が挟まれた第１圧電素子３、第２圧電素子４、第３圧電素子５及び第４圧電素子６と、第１圧電素子３の第２電極１３と第２圧電素子４の第２電極１３とを接続する第１配線８と、第３圧電素子５の第２電極１３と第４圧電素子６の第２電極１３とを接続する第２配線９と、第１配線８を跨いで第２配線９と接続する第３配線１０ｂと、第１配線８と第３配線１０ｂとの間に位置する絶縁膜２１と、を備え、絶縁膜２１は無機物からなる無機絶縁膜７と有機物からなる有機絶縁膜１８とを有し、無機絶縁膜７は圧電素子２を覆う。【選択図】図１
