PROBLEM TO BE SOLVED: To provide a particle beam transmission window and a particle beam irradiation device having the particle beam transmission window, which can achieve the high transmittance of a particle beam including a charged particle beam such as an electron beam and an ion beam and an electromagnetic wave such as an X-ray and a gamma-ray while avoiding the breakage due to an atmospheric pressure from the outside and a pressure fluctuation.SOLUTION: A transmission window 130 is mounted on a vacuum chamber 102 of an electron beam irradiation device 100 having a generation part 104 of electron beams 110, and transmits the electron beams 110 from the inside to the outside of the vacuum chamber 102. The transmission window includes a metal thin film 132 transmitting the electron beams 110, and first and second frames 134, 142 which are airtightly joined to the metal thin film 132 in a manner to hold the metal thin film 132 therebetween in order to mount the metal thin film 132 on the vacuum chamber 102. The first and second frames 134, 142 have a honeycomb structure in a transmission area 126 of the electron beams 110.COPYRIGHT: (C)2013,JPO&INPIT【課題】外側からの大気圧や圧力変動による破損を回避しつつ電子線、イオンビームなどの荷電粒子線、X線やガンマ線などの電磁波などの粒子線の高い透過率が可能となる。【解決手段】電子線110の発生部104を備える電子線照射装置100の真空チャンバ102に取り付けられ、電子線110を真空チャンバ102の内側から外側に透過させる透過窓130であって、電子線110が透過する金属薄膜132と、金属薄膜132を真空チャンバ102に取り付けるために、金属薄膜132を挟持する形態で金属薄膜132に気密接合される第1、第2フレーム134、142と、を備え、第1、第2フレーム134、142は、電子線110の通過領域126でハニカム構造とされている。【選択図】図3
