PROBLEM TO BE SOLVED: To provide an irradiation device capable of detecting deviation of the optical axis of laser beam easily, without causing energy loss even during irradiation of laser beam, and capable of restoring deviation of the optical axis.SOLUTION: An irradiation device 10 includes a first light source 21 of laser beam 20, a second light source 22 generating positional deviation detection beam 23 having a wavelength different from that of the laser beam 20, a first dichroic mirror 41 for reflecting the positional deviation detection beam 23, transmitting the laser beam 20, and making both beams coaxial, a second dichroic mirror 42 for reflecting the positional deviation detection beam 23, transmitting the irradiation laser beam 20, and introducing only the irradiation laser beam 20 to a final optical unit 43, and a two-dimensional detector 44 for receiving the positional deviation detection beam 23 reflected on the second dichroic mirror 42. Based on the detection position of the positional deviation detection beam 23 received by the two-dimensional detector 44, a determination is made whether or not a planned irradiation position of an object T has ben irradiated with the laser beam 20.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2016,JPO&INPIT【課題】レーザー光の照射中でもエネルギーロスを生じさせることなく、レーザー光の光軸のずれを容易に検出し、光軸のずれを復旧できる照射装置を提供すること。【解決手段】照射装置10は、レーザー光20の第1光源21と;レーザー光20と異なる波長を有する位置ずれ検出用光23を発生させる第2光源22と;位置ずれ検出用光23を反射させ、レーザー光20を透過させて、両光を同軸にする第1ダイクロイックミラー41と;位置ずれ検出用光23を反射させ、照射用レーザー光20を透過させて、照射用レーザー光20のみを最終光学ユニット43に導く第2ダイクロイックミラー42と;第2ダイクロイックミラー42で反射した位置ずれ検出用光23を受光する二次元検出器44とを備える。二次元検出器44で受光した位置ずれ検出用光23の検出位置に基づき、レーザー光20が対象物Tの照射予定位置に照射されているか否かを判断する。【選択図】図1
