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被検部情報取得装置
专利权人:
CANON INC
发明人:
YAMAMOTO TAKESHI,山本 毅,OKOBA MINORU,大古場 稔
申请号:
JP2014169553
公开号:
JP2016043045A
申请日:
2014.08.22
申请国别(地区):
JP
年份:
2016
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a technique which, in the case of acquiring information on a portion to be inspected by using an acoustic medium accommodated between a portion to be inspected and a portion-to-be-inspected holding part, prevents the acoustic medium from being leaked to the outside.SOLUTION: A device for acquiring information on a portion to be inspected comprises a portion-to-be-inspected contact part 93 which can be deformed corresponding to the shape of the portion to be inspected 1 and brought into contact between the portion to be inspected 1 and a portion-to-be-inspected holding part 11. While keeping a sealed space constituted by the portion to be inspected 1, the portion-to-be-inspected contact part 93, and the portion-to-be-inspected holding part 11 in a state of negative pressure lower than the atmospheric pressure to keep the portion to be inspected 1 in close contact with the portion-to-be-inspected contact part 93, pressure adjusting means 91 accommodates an acoustic medium 12 in the sealed space.SELECTED DRAWING: Figure 2COPYRIGHT: (C)2016,JPO&INPIT【課題】被検部と被検部保持部の間に収容する音響媒質を使用して被検部の情報を取得する際に、音響媒質が外部に漏れないようにする技術を提供する。【解決手段】被検部情報取得装置は、被検部1と被検部保持部11の間に、被検部の形状に合わせて変形し、密着することの出来る被検部接触部93を設けている。圧力調整手段91が、被検部1と被検部接触部93と被検部保持部11によって構成された密閉空間を大気圧より低い圧力の負圧状態に維持し、被検部1を被検部接触部93に密着させた状態で音響媒質12を密閉空間に収容する。【選択図】 図2
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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