RADIATING ELEMENT FOR IRRADIATING SURFACES, HAVING A SOCKET

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专利权人:

Helmut Halfmann

发明人:

Helmut Halfmann,Axel Hombach,Markus Roth

申请号：

US13812522

公开号：

US20130119279A1

申请日:

2011.10.26

申请国别(地区):

US

年份:

2013

代理人:

摘要：

In various embodiments, an emitter for the irradiation of surfaces is provided. The emitter may include: an emitter vessel and an emitter base connected thereto, wherein the emitter base has at least one gas opening, which is designed for supplying a process gas into a spatial area adjacent to the emitter vessel.

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