A plasma equipment comprising a microwave oscillator forgenerating a predetermined microwave band a microwaveresonant cavity for allowing the predetermined microwave bandto resonate microwave radiation means for radiating themicrowave into the microwave resonant cavity, wherein themicrowave radiation means is a microwave radiation antennahaving the shape and the size so as to form a strong electricfield of the microwave in a plasma generation field formed bythe microwave and plasma ignition means for making partialdischarge in gas in the microwave resonant cavity and theninduces plasma in the gas, wherein the plasma ignition meansuses barrier discharge which inserts an insulating material.
