Hyung Ju PARK,Hyeon-Bong PYO,Seong-Mok CHO,Moon Youn JUNG,Seunghwan KIM
申请号：
US13687177
公开号：
US20130158632A1
申请日:
2012.11.28
申请国别(地区):
US
年份:
2013
代理人:
摘要：
Provided are a method of manufacturing a target for generating charged particles, a target structure, and a treatment apparatus including the target structure. The method includes forming a source layer on a substrate, forming balls on the source layer, forming a metal thin layer on the source layer exposed between the balls, and removing the balls to form holes in the metal thin layer so as to expose the source layer.
