To promptly take a high quality image of an object to be inspected, provided is an imaging method for taking an image of the object to be inspected by irradiating the object to be inspected with measuring light, in which an aberration generated in the object to be inspected is corrected by an aberration correction unit. The method includes the repeatedly performed steps of measuring the aberration generated in the object to be inspected, correcting the aberration by controlling the aberration correction unit in accordance with the measured aberration, and storing, in a storage unit, a control state of the aberration correction unit in association with the measured aberration. The aberration correction unit is controlled in a predetermined control state stored in the storage unit.
