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COMMANDE DE L'ENERGIE DE SORTIE DE LASERS
专利权人:
AMO Manufacturing USA; LLC
发明人:
申请号:
EP07840127.0
公开号:
EP1997199B1
申请日:
2007.02.27
申请国别(地区):
EP
年份:
2017
代理人:
摘要:
Devices, systems, and methods control pulse energies of excimer and other lasers, particularly for refractive correction in which a pulse rate, pulse energy, or other parameters of a pulsed laser is varied during use. A calibration laser mode may be used to fire a series of laser pulses to characterize a correlation between laser energy and a laser operation parameter (typically discharge high voltage) throughout a range. During an operation mode, subsequent voltages may be set based on energies of prior pulses while accounting for a curve or change in rate of the correlation.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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