Mit der vorliegenden Erfindung soll eine Vorrichtung und ein Verfahren bereitgestellt werden, mit denen Aberrationen verschiedener Ordnungen sowie Streulichtkenngrößen eines optischen Abbildungs- bzw. Projektionssystems simultan erfasst, separiert und quantifiziert werden können.The device has an optical transmission system provided with two detection units (DET A, DET B) and a control and evaluation unit. The transmission system comprises a bistable reflective structure element (rSE) and a transmissive structure element in a plane that is arranged conjugated to a secondary light source (Q2). The light source is formed as a collimated illumination beam that is focused on a projection surface by an optical system (ZS). The transmission system comprises a beam splitter and a lens (L1) that is arranged in front of the reflective or transmissive structure element. The reflective and transmissive structure elements are designed as programmable diaphragms. Independent claims are also included for the following: (1) a method for parallel acquisition of aberrations and scattered light characteristics of an optical system (2) a method for sequential acquisition of aberrations and scattered light characteristics of an optical system.
