PROBLEM TO BE SOLVED: To provide an inexpensive X-ray shielding grating capable of achieving a high aspect ratio, and to provide a production method thereof.SOLUTION: In an X-ray shielding grating formed by laminating a plurality of partial gratings, each of the plurality of partial gratings has a structure in which each grating element formed by arraying an X-ray shielding part and an X-ray transmission part in a first cycle is arrayed in a second cycle, and such a constitution is adopted that each first cycle in each of the plurality of partial gratings is equal, and that each second cycle in each of the plurality of partial gratings is different respectively.COPYRIGHT: (C)2015,JPO&INPIT【課題】 低コストで、高アスペクト比とすることが可能となるX線遮蔽格子およびその製造方法を提供する。【解決手段】 複数の部分格子が積層したX線遮蔽格子であって、前記複数の部分格子の夫々は、X線遮蔽部とX線透過部とが第一の周期で配列された格子要素が第二の周期で配列された構造を有し、前記複数の部分格子の夫々の前記第一の周期同士は等しく、前記複数の部分格子の夫々の前記第二の周期同士が異なるように構成されている。【選択図】 図1
