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MOUNTING SYSTEM THAT MAINTAINS STABILITY OF OPTICS AS TEMPERATURE CHANGES
专利权人:
Align Technology; Inc.
发明人:
Rami Boltanski
申请号:
US16052481
公开号:
US20180338820A1
申请日:
2018.08.01
申请国别(地区):
US
年份:
2018
代理人:
摘要:
An optical system comprises a detector to determine one or more intensities of light impinging on one or more locations of the detector and an optical element to direct light towards the detector along a detection axis. The detector and optical element are coupled together by three or more substantially flat flexures respectively defining three or more flexure planes parallel to the detection axis. The three or more substantially flat flexures maintain an alignment of the optical element to the detector with changes in temperature.
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