PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrator of an ultrasonic probe easily and at low cost without cutting the piezoelectric vibrator for each channel.SOLUTION: In a piezoelectric vibrator 1 for an ultrasonic probe, a plurality of bottomed groove parts 13 formed in a scan direction of the piezoelectric vibrator 1 in such a manner that a principal plane of ta piezoelectric vibration body 10 is exposed in a slice direction, and ground common electrodes 14 formed on an end face of the piezoelectric vibration body 10 at an ultrasonic radiation surface side are formed on a formation surface of signal electrodes 11a. A signal electrode 11 is separated into a plurality of signal electrodes 11a and ground electrodes 11b in the scan direction of the piezoelectric vibrator 1 by the groove parts 13, and the separated ground electrodes 11b are electrically connected by the ground common electrodes 14.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2017,JPO&INPIT【課題】圧電振動子をチャンネル毎に切断せずに、容易かつ安価に超音波探触子の圧電振動子を製造する方法を提供する。【解決手段】超音波探触子の圧電振動子1において、信号電極11aの形成面に、圧電振動子1の走査方向に沿ってスライス方向に圧電振動体10の主面が露出するように形成した複数個の有底の溝部13と、圧電振動体10の超音波放射面側の端面に形成したグランド共通電極14と、を形成し、溝部13により信号電極11を圧電振動子1の走査方向に複数個の信号電極11aとグランド電極11bに分離するとともに、グランド共通電極14により、分離されたグランド電極11bを電気的に接続する。【選択図】図1
