FAN Xudong,ZHU Hongbo,NIDETZ Robert,KURABAYASHI Katsuo,ZHOU Menglian,LEE Jiwon
申请号：
US201615571792
公开号：
US2018164261(A1)
申请日:
2016.05.04
申请国别(地区):
美国
年份:
2018
代理人:
摘要：
A rapid flow-through, highly sensitive microfluidic photoionization detector (PID) which is micro-fabricated directly onto a substrate, such as a conductive silicon wafer, is provided. The microfluidic PID has an ionization chamber volume of less than 9 μL. The microfluidic PID may have a flow through design with a microfluidic channel defines a serpentine pattern on the substrate. The flow through design of the microfluidic PID results in negligible dead volume, thus allowing a shortened response time over existing commercially available designs. Such microfluidic PIDs are particularly useful with gas chromatography (GC), including microGC and multi-dimensional microGC systems. Methods for calibrating PIDs are also provided.
