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SYSTEM AND METHOD FOR MULTI-BEAM SCANNING
专利权人:
AMO DEVELOPMENT LLC
发明人:
BOR, ZSOLT,HOLLAND, GUY V.,HORVATH, CHRISTOPHER
申请号:
CA2745296
公开号:
CA2745296C
申请日:
2009.12.01
申请国别(地区):
CA
年份:
2017
代理人:
摘要:
The present application relates tosystems (10) and method of photoaltering amaterial. The system (10) includes a laser source (14)op-erable to produce a primary pulsed beam (18), aholographic optical element (32) configured toreceive the primary pulsed beam (18) and transmit aplurality of secondary beams (36), and a scanner(20) operable to direct the secondary beams (36) tothe material. The secondary beams (36) are basedon the primary pulsed beam (18). The methodincludes phase shifting a pulsed laser beam toproduce an input beam (36), holographically alteringthe input beam to produce a plurality oftransmission beams (36), and scanning a portion of thematerial (12) with the transmission beams (36).
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