DAVIS, Michael W.,LADWIG, Peter F.,LANG, Matthew S.,MYERS, Dean E.,OLSEN, Clark T.,RIEMER, Douglas P.
申请号:
EP17748271
公开号:
EP3410929A4
申请日:
2017.02.03
申请国别(地区):
EP
年份:
2020
代理人:
摘要:
A pressure/force sensor comprises a diaphragm structure including a sensing element and a lead structure extending from the diaphragm structure and including first and second traces electrically coupled to the sensing element. The diaphragm structure and the lead structure include a circuit assembly comprising a common insulating layer and a common conductor layer on the insulating layer. The conductor layer includes at least a portion of the sensing element and at least the first trace. In embodiments the sensing element includes electrodes. In other embodiments the sensing element includes a strain gauge.