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CAPACITIVE TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME
专利权人:
发明人:
Kazutoshi Torashima,Takahiro Akiyama,Kenji Hasegawa,Kazuhiko Kato
申请号:
US14463420
公开号:
US20150057547A1
申请日:
2014.08.19
申请国别(地区):
US
年份:
2015
代理人:
摘要:
A method for manufacturing a capacitive transducer is provided having a structure in which a vibrating film is supported to be able to vibrate. The method includes forming a sacrificial layer on a first electrode forming a layer on the sacrificial layer, the layer forming at least part of the vibrating film removing the sacrificial layer, including forming etching holes to communicate with the sacrificial layer forming a sealing layer for sealing the etching holes and etching at least part of the sealing layer. Before forming the sealing layer, an etching stop layer is formed on the layer forming at least part of the vibrating film. In the step of etching at least part of the sealing layer, the sealing layer is removed until the etching stop layer is reached.
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