PROBLEM TO BE SOLVED: To prolong a service life of a vacuum maintenance member in a body case of an X-ray sensor by providing an active metal film in the body case, which enables detection of the degree of vacuum in the body case and thereby enables appropriate activation of the vacuum maintenance member in the body case.SOLUTION: The X-ray sensor comprises a vacuum-sealed body case including target sections and electron sources sequentially placed so as to face an inner face of an X-ray incident surface of the body case. The X-ray sensor includes in the body case: a vacuum maintenance member activation means of the vacuum maintenance member an active metal film detecting the degree of vacuum in the body case and a control unit determining the degree of vacuum from the active metal film to control the activation means of the vacuum maintenance member and activating the vacuum maintenance member.COPYRIGHT: (C)2012,JPO&INPIT【課題】活性金属膜を本体ケース内に設け、この活性金属膜より本体ケース内の真空度合いを検知することが可能となるので、X線センサの本体ケース内の真空維持部材を適切に活性化することができるため、本体ケース内の真空維持部材の寿命を長くすることができる。【解決手段】真空密封された本体ケースと、この本体ケースのX線入射面の内面と対向して順次設けられたターゲット部、電子源と、を備え、前記本体ケース内には、真空維持部材と、この真空維持部材の活性化手段と、前記本体ケース内の真空度合いを検知する活性金属膜と、この活性金属膜からの真空度合いを判定して前記真空維持部材の活性化手段を制御し、前記真空維持部材を活性化する制御部と、を設けたX線センサ。【選択図】図4
