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Control apparatus and control method
专利权人:
发明人:
Tomoyuki Makihira,Yoshihiko Iwase,Makoto Sato,Kazuhide Miyata,Hiroyuki Shinbata,Ritsuya Tomita,Daisuke Kibe
申请号:
US14592471
公开号:
US09888844B2
申请日:
2015.01.08
申请国别(地区):
US
年份:
2018
代理人:
摘要:
A control apparatus includes an irradiation unit configured to irradiate a measurement object with a measuring beam, a restriction unit configured to restrict the measuring beam from being incident on the measurement object and to reflect or scatter the measuring beam, and a polarization control unit configured to control, based on the measuring beam reflected or scattered by the restriction unit, polarization of the measuring beam.
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中国工程科技知识中心
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