PROBLEM TO BE SOLVED: To provide a sterilization method capable of providing a desired sterilization performance, at short times when performing sterilization using ozone.SOLUTION: There is provided the sterilization method in which when ozone gas is supplied to a sterilization target area to sterilize bacteria present in the sterilization target area, the ozone gas and moisture that are individually transported are supplied to the sterilization target area. The ozone gas and moisture can be mixed in front of or inside the sterilization target area. As the ozone gas, dry state ozone gas, or wet state ozone gas can be used, and as the moisture, steam or heated sprayed water can be used.SELECTED DRAWING: Figure 2