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Capacitive micromachined ultrasonic transducer with multiple deflectable membranes
专利权人:
UNIVERSITY OF MANITOBA
发明人:
Tahereh Arezoo Emadi,Douglas A. Buchanan
申请号:
US14772517
公开号:
US09925561B2
申请日:
2014.03.03
申请国别(地区):
US
年份:
2018
代理人:
摘要:
A capacitive micromachined ultrasonic transducer (CMUT) having at least two deflectable membranes. The membranes are spaced from each other, and the membranes contribute to and/or are responsive to receive or transmit an ultrasonic signal. Spacing between the at least two deflectable membranes is adjustable through application of a voltage to cause deflection of at least one of the deflectable membranes, to affect the receive/transmit properties of the CMUT.
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