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CORE CONFIGURATION WITH ALTERNATING POSTS FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING SYSTEM
专利权人:
Applied Materials, Inc.
发明人:
Iravani Hassan G.,Swedek Boguslaw A.,Liu Tzu-Yu,Xu Kun,Shen Shih-Haur
申请号:
US201715727297
公开号:
US2018122667(A1)
申请日:
2017.10.06
申请国别(地区):
美国
年份:
2018
代理人:
摘要:
An apparatus for chemical mechanical polishing includes a platen having a surface to support a polishing pad and an electromagnetic induction monitoring system to generate a magnetic field to monitor a substrate being polished by the polishing pad. The electromagnetic induction monitoring system includes a core positioned at least partially in the platen and a coil wound around a portion of the core. The core includes a back portion and a multiplicity of posts extending from the back portion in a first direction normal to the surface of the platen. The core and coil are configured such that the multiplicity of posts include a first plurality of posts to provide a first magnetic polarity and a second plurality of posts to provide an opposite second magnetic polarity, and the first plurality of posts and the second plurality of posts are arranged in an alternating pattern.
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