ROHM AND HAAS ELECTRONIC MATERIALS LLC;THE UNIVERSITY OF QUEENSLAND
发明人:
Thackeray James W.,Du Ke,Trefonas, III Peter,Blakey Idriss,Whittaker Andrew Keith
申请号：
US201514820699
公开号：
US9957339(B2)
申请日:
2015.08.07
申请国别(地区):
美国
年份:
2018
代理人:
Cantor Colburn LLP
摘要：
A copolymer is prepared by the polymerization of monomers that include an ultraviolet absorbing monomer, and a base-solubility-enhancing monomer. The copolymer is useful for forming a topcoat layer for electron beam and extreme ultraviolet lithographies. Also described are a layered article including the topcoat layer, and an associated method of forming an electronic device.
