搬送装置

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专利权人:

ダイキン工業株式会社

发明人:

清水 芳広,昼間 隆治

申请号：

JP2011014492

公开号：

JP5565330B2

申请日:

2011.01.26

申请国别(地区):

JP

年份:

2014

代理人:

摘要：

PROBLEM TO BE SOLVED: To convey an object to a clean room in a different floor while keeping the object sterilized.SOLUTION: This conveying device for conveying an object (A) between clean rooms (C2, C3) in different floors is provided with a sterilization mechanism for supplying sterilization gas containing a sterilization component into a carriage (50) of the conveying device and a conveyance path (14).

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/