James A. Bickford,Stephanie Lynne Golmon,Paul A. Ward,William D. Sawyer,Marc S. Weinberg,John J. LeBlanc,Louis Kratchman,James S. Pringle, JR.,Daniel Freeman,Amy Duwel,Max Lindsay Turnquist,Ronald Ste
申请号：
US15944234
公开号：
US20180292470A1
申请日:
2018.04.03
申请国别(地区):
US
年份:
2018
代理人:
摘要：
Aspects are generally directed to a compact and low-noise magnetic field detector, methods of operation, and methods of production thereof. In one example, a magnetic field detector includes a proof mass, a magnetic dipole source coupled to the proof mass, and a substrate having a substrate offset space defined therein, the proof mass being suspended above the substrate offset space. The magnetic field detector further includes a sense electrode disposed on the substrate within the substrate offset space and positioned proximate the proof mass, the sense electrode being configured to measure a change in capacitance relative to the proof mass from movement of the proof mass in response to a received magnetic field at the magnetic dipole source. The magnetic field detector includes a control circuit coupled to the sense electrode and configured to determine a characteristic of the magnetic field based on the measured change in capacitance.
