走査ビーム装置の較正

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专利权人:

ユニヴァーシティ オブ ワシントン

发明人:

ジョンストン リチャード エス

申请号：

JP2009545530

公开号：

JP5513897B2

申请日:

2007.04.20

申请国别(地区):

JP

年份:

2014

代理人:

摘要：

Scanning beam device calibration using a calibration pattern is disclosed. In one aspect, a method may include acquiring an image of a calibration pattern using a scanning beam device. The acquired image may be compared with a representation of the calibration pattern. The scanning beam device may be calibrated based on the comparison. Software and apparatus to perform these and other calibration methods are also disclosed.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/