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Electrode arrangement for a barrier plasma
专利权人:
CINOGY GmbH
发明人:
Dirk Wandke,Mirko Hahnl,Matthias Kopp,Leonhard Trutwig,Karl-Otto Storck
申请号:
US14419671
公开号:
US09345120B2
申请日:
2013.07.18
申请国别(地区):
US
年份:
2016
代理人:
摘要:
An electrode arrangement for forming a dielectrically impeded plasma between an active surface of a flexible, planar electrode that can be connected to a high voltage source has a planar, flexible dielectric that forms the active surface which is connected to the planar electrode to form an electrode element where the electrode is completely covered towards to surface to be treated. The electrode arrangement is adaptable to irregular surfaces using a contact with surface elasticity for pressing onto the rear face of the electrode element facing away from the surface such that the electrode element by local deformation is automatically adapted to the irregularities.
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