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ULTRASONIC TRANSDUCER, MANUFACTURING METHOD THEREOF, AND ULTRASONIC IMAGING DEVICE
专利权人:
Ltd.;Hitachi
发明人:
Taiichi TAKEZAKI,Masakazu KAWANO,Shuntaro MACHIDA
申请号:
US16699185
公开号:
US20200171538A1
申请日:
2019.11.29
申请国别(地区):
US
年份:
2020
代理人:
摘要:
A highly-sensitive ultrasonic transducer with good yield is provided. The ultrasonic transducer includes a cavity layer, a pair of electrodes positioned above and below the cavity layer, insulating layers disposed above and below each of the pair of electrodes, and a filled hole that penetrates, in a vertical direction, at least a portion of the insulating layers positioned above the cavity layer. When the ultrasonic transducer is viewed from above, each electrode of the pair of electrodes includes, at a position that overlaps the embedded hole, a non-electrode region where the electrodes are not formed.
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