PROBLEM TO BE SOLVED: To firmly adhere between layers of an ultrasonic vibrator unit in a multilayer structure, and to improve conductivity between the layers.SOLUTION: An array vibrator formed of individual vibrators is formed by cutting a vibrator blank to quarry individual vibrators. The vibrator blank includes layers of materials to become electroconductive acoustic matching layers 28A, 28B in addition to a layer of a material to become piezoelectric elements. Mutually opposing surfaces of adjacent layers are processed to have a surface roughness into a predetermined roughness and further, an electrode film 54 is formed over these surfaces. Both the layers are bonded with a non-electroconductive adhesive 58. The adhesion is made stronger by the surface roughness. Contact resistance between the layers is decreased with the electrode film.COPYRIGHT: (C)2014,JPO&INPIT【課題】多層構造の超音波振動子ユニットの層間を強固に接着し、かつ層間の導電性を向上する。【解決手段】個振動子からなるアレイ振動子は、振動子ブランクを切断して個振動子を切り出して形成される。振動子ブランクは、圧電素子となる素材の層の他、導電性の音響整合層28A,28Bとなる素材の層を含む。隣接の層の互いに対向する表面に対し、表面粗さを所定の粗さとする加工を行い、更にこれらの表面に電極膜54を形成する。両層を非導電性の接着剤58で接合する。表面の粗さにより接着が強固となる。電極膜により層間の接触抵抗が減少する。【選択図】図7
