The clean air devices which possess the ability to sterilize also the downstream surface of the filter uniformly and effectively are offered.The pre- filter 23 which filtering does the air which is introduced into order between up to the air supply ports 22 which forward the pure air to work environment from the air intake 18 which introduces the air roughly, the blower 24 which absorbs the air which is introduced, the heater 25 which adjusts the temperature of the air which is introduced, medicine gas feeder 27, filtering doing the air which is forwarded from the medicine gas emission device 26 which supplies the medicine gas inside the air duct, and air supply port 22, the advanced filter and or the extreme high efficiency filter it has 41 which forms the pure air and 42.フィルターの二次側表面をも均一にかつ効果的に滅菌する能力を有する清浄空気供給装置を提供する。空気を導入する空気取り入れ口18から清浄空気を作業環境に送出する空気供給口22までの間に順に導入した空気を粗フィルタリングするプレフィルター23、導入する空気を吸引するブロワー24、導入した空気の温度を調整するヒーター25、薬剤ガス供給装置27、空気通路内に薬剤ガスを供給する薬剤ガス吐出装置26、及び空気供給口22から送出される空気をフィルタリングして清浄空気を生成する高性能フィルター及びまたは超高性能フィルター41、42を備える。
