PROBLEM TO BE SOLVED: To provide a vibration detector which improves the sensitivity of the vibration detector such as a flesh conduction microphone and also improves the productivity.SOLUTION: In a vibration detector, a vibration detection element (4) having a diaphragm (4a) on an upper surface is housed in a case body (3) having an opening (2a) at an upper part thereof. In the vibration detector, a sealed air chamber (7) is formed at an upper part of the diaphragm (4a) and a vibration detection film (6) is provided at the upper part of the air chamber (7). Further, the vibration detection film (6) does not contact with the diaphragm (4a). The structure reduces the mass of a vibration system to improve the sensitivity compared to conventional products. Further, a polymer elastomer liquid is not used in the manufacturing. Thus, the hardening time of the polymer elastomer liquid is omitted to improve the productivity.COPYRIGHT: (C)2014,JPO&INPIT【課題】肉伝導マイクロホンのような振動検出装置の感度を向上させ、かつ生産性も向上させた振動検出装置を提供する。【解決手段】上部に開口部(2a)を有するケース本体(3)内に、上面に振動板(4a)を有する振動検出素子(4)が収納された振動検出装置において、前記振動板(4a)の上部に密閉状の空気室(7)を形成し、空気室(7)の上部に振動検出膜(6)を設け、この振動検出膜(6)と前記振動板(4a)とを非接触とし、従来品に比べ振動系の質量を軽減させ感度を良好とした。また、製作にあたり高分子エラストマー液を用いないため、その硬化時間を省くことができ、生産性を向上させた。【選択図】図1
