The invention relates to some biocompatible materials in thin layers as monolayers or multilayers used for coating titanium alloys employed in making dental implants and biomedical devices in stomatology. According to the invention, the materials are made either of individual thin layers of oxynitride type, such as TaON, TiON, ZrON, TaTiON, TaZrON and TiZrON, the oxide TaOor carboxynitrides such as TaCON, TiCON, ZrCON, TaTiCON, TaZrCON and TiZrCON, with O/N andO/(C+N) ratios ranging between 0.25...4, with a ratio between metals ranging between 0.5...2, and the ratio between metals and non-metals between 0.8...3.3, either alternating individual thin layers of oxynitride type TaON/TiON, TaON/ZrON, TiON/ZrON, oxides TaO/TiO, TaO/ZrO, TiO/ZrOor carboxynitrides TaCON/TiCON, TaCON/ZrCON, TiCON/ZrCON, the thickness ratio of the individual layers ranging between 0.25...4, with the thickness of individual pairs of thin layers in the range of 5...400 nm, with a total thickness in the range of 1...4 &mu m, with high adherence to substrate, the critical normal forces in the scratch adhesion testing being between 10...40 N, with microhardness ranging between 8...34 GPa, the amount of ions released in the Carter-Brugirard artificial saliva being lower than 40 &mu g/cm, with corrosion rates lower than 8x10mm/year, the cellular viability factor being higher than 80% upon cytotoxicity assay.Invenţia se referă la materiale din straturi subţiri biocompatibile, sub formă de monostraturi sau multistraturi, folosite pentru acoperirea aliajelor de titan din care sunt realizate implanturile dentare şi dispozitivele biomedicale din stomatologie. Materialele conform invenţiei sunt realizate fie din straturi subţiri individuale, de tip oxinitruri cum sunt TaON, TiON, ZrON, TaTiON, TaZrON şi TiZrON, oxidul TaO, sau carbo-oxinitruri cum sunt TaCON, TiCON, ZrCON, TaTiCON, TaZrCON şi TiZrCON, cu rapoarte O/N şi O/(C+N) cuprinse între 0,25...4, cu raportul între metale cuprins între 0,5...2, ia