A sterilization/dust removal device having a chamber that is airtight and has at least one inlet and outlet; at least one heating and dehumidifying unit that raises the temperature in the chamber to at least sixty degrees Celsius, and lowers the chamber The humidity in the medium is less than forty percent; and at least one deep ultraviolet light source is irradiated into the chamber.一種殺菌/除塵螨裝置,其具有一腔室,該腔室為氣密且具有至少一出入口;至少一加熱除濕單元,提升該腔室中的溫度到至少攝氏六十度,以及降低該腔室中的濕度到低於百分之四十;以及至少一深紫外線光源,向該腔室中照射。