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In-plane electromagnetic MEMS pump
专利权人:
John S. Foster;Gregory A. Carlson;Paul J. Rubel;Steven S. Hovey;Christopher S. Gudeman
发明人:
Gregory A. Carlson,John S. Foster,Christopher S. Gudeman,Steven S. Hovey,Paul J. Rubel
申请号:
US12801162
公开号:
US08690830B2
申请日:
2010.05.26
申请国别(地区):
US
年份:
2014
代理人:
摘要:
A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.
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中国工程科技知识中心
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