您的位置: 首页 > 农业专利 > 详情页

Methods and apparatus for correcting for non-uniformity in a plasma processing system
专利权人:
Rajinder Dhindsa;Sang Ki Nam
发明人:
Sang Ki Nam,Rajinder Dhindsa
申请号:
US13423279
公开号:
US09230779B2
申请日:
2012.03.19
申请国别(地区):
US
年份:
2016
代理人:
摘要:
A plasma processing system having a plasma processing chamber comprising at least one of a chamber wall and a chamber liner is disclosed. The plasma processing system includes a plurality of ground straps disposed around a circumference of a chamber surface, the chamber surface being one of the chamber walls and the chamber liner of the plasma processing chamber. The plasma processing system further includes at least a first impedance device coupled to at least a first ground strap of the plurality of ground straps, wherein a second ground strap of the plurality of ground straps is not provided with a second impedance device having the same impedance value as the first impedance device.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/
相关发明人
rajinder dhindsa
sang ki nam
相关专利

意 见 箱

匿名:登录

个人用户登录

找回密码

第三方账号登录

忘记密码

个人用户注册

必须为有效邮箱
6~16位数字与字母组合
6~16位数字与字母组合
请输入正确的手机号码

信息补充