Optical model selection method, detected light amount distribution correction method, optical model correction method, and optical inspection apparatus
PROBLEM TO BE SOLVED: To provide an optical inspection device that can improve inspection accuracy.SOLUTION: An optical inspection method of a first embodiment inspecting a subject using an optical sensor including an irradiation system plurally containing a light source module LM, and a detection system plurally containing a detection module DM detecting an amount of light of light with which a measurement object is irradiated from the irradiation system and propagating in the measurement object includes the steps of: obtaining a first detection light-amount distribution serving as a detection light-amount (a light-amount distribution) for each of a plurality of optical models simulating the subject by a simulation virtually using the optical sensor； obtaining a second detection light-amount distribution serving as a detection light-amount (a light-amount distribution) of the subject using the optical sensor； and comparing the first detection light-amount distribution with the second detection light-amount distribution, and selecting the optical model suitable for the subject from the plurality of optical models.SELECTED DRAWING: Figure 16
