PROBLEM TO BE SOLVED: To enable high-precision aberration correction.SOLUTION: Aberration is measured as phase information at each of a plurality of aberration measurement points. When the aberration is corrected by correction pixels of a larger number of aberration correction means than the number of the plurality of aberration measurement points, the correction pixel corresponding to each aberration measurement point is driven on the basis of the phase information, and the correction pixel, which does not positionally correspond to the aberration measurement point, drives the aberration correction means on the basis of the phase information near the correction pixel.COPYRIGHT: (C)2014,JPO&INPIT【課題】高精度な収差補正が可能となる。【解決手段】収差を複数の収差測定点のそれぞれにおける位相情報として測定し、複数の収差測定点よりも数が多い収差補正手段の補正画素で収差を補正する際に、各収差測定点に対応する補正画素は位相情報を基に駆動し、収差測定点と位置的に対応しない補正画素は当該補正画素の近傍の位相情報を基に収差補正手段を駆動する。【選択図】 図6
