PROBLEM TO BE SOLVED: To provide a piezoelectric element, an ultrasonic sensor, a discharge head, an ultrasonic device, a liquid discharge device and a method of manufacturing a piezoelectric element, capable of avoiding film quality deterioration with time and loss of vibration characteristics.SOLUTION: A supporting film 52 is provided on an opening portion 51A and a wall portion 51B of a substrate 51, a piezoelectric film 54 is provided on a first region 521 corresponding to the opening portion 51A of the supporting film 52 and on a second region 522 corresponding to the wall portion 51B, and a film thickness t2 of the piezoelectric film 54 provided on the second region 522 is set smaller than a film thickness t1 of the piezoelectric film 54 provided on the first region 521. Therefore, of the piezoelectric film 54, vibration in a region provided for vibration is large and vibration in a region not provided for vibration is small, so that a problem such as loss of vibration characteristics of the piezoelectric element is improved.SELECTED DRAWING: Figure 7【課題】膜質の経時劣化及び振動特性の損失を回避できる圧電素子、超音波センサー、吐出ヘッド、超音波装置、液体吐出装置及び圧電素子の製造方法を提供すること。【解決手段】基材５１の開口部５１Ａと壁部５１Ｂとに支持膜５２を設け、支持膜５２の開口部５１Ａに対応する第一領域５２１と壁部５１Ｂに対応する第二領域５２２とに圧電膜５４を設け、第二領域５２２の上に設けられた圧電膜５４の膜厚ｔ２を、第一領域５２１に設けられた圧電膜５４の膜厚ｔ１よりも小さくした。そのため、圧電膜５４のうち振動に供する領域での振動が大きく、振動に供さない領域での振動が小さくなり、圧電素子の振動特性の損失等の不都合が改善される。【選択図】図７
