Cameron, James F.,Sung, Jin Wuk,Amara, John P.,Prokopowicz, Gregory P.,Valei, David A.
申请号：
EP20100152673
公开号：
EP2216683(B1)
申请日:
2010.02.04
申请国别(地区):
欧洲专利局
年份:
2018
代理人:
摘要：
Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a diene/dienophile reaction product. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
