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Sensitivity measuring device and inspection device
专利权人:
Hitachi High-Technologies Corporation
发明人:
Hideaki Minekawa,Muneo Maeshima,Akira Masuya
申请号:
US15568093
公开号:
US10624712B2
申请日:
2016.03.28
申请国别(地区):
US
年份:
2020
代理人:
摘要:
This sensitivity measuring device is provided with: a stage for placing a sample container; a temperature adjustment device that is provided with an upper heating body and a lower heating body, which are disposed above and below the sample container; and an image pickup device for picking up an image of the sample container, said image pickup device being provided with a lighting apparatus and an image pickup apparatus. Each of the upper heating body and the lower heating body has a structure wherein the temperature of a first region, a peripheral portion, is higher than the temperature of a second region including a center portion.
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中国工程科技知识中心
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