Efficient method for preparing sulfonium photoacid generators (PAGs) by microwave-assisted reaction of diarylsufides in the presence of alkylaryliodonium salts. Microwave-assisted synthesis of the PAGs is significantly faster, reducing reaction time with less energy consumption. Reaction times using the microwave-assisted synthesis are in a range of from 90 to 420 faster than conventional thermal conditions. The photoacid quantum yields of several salts prepared by the microwave reaction were measured the photoacid quantum yields of new sulfonium PAGs were in a range from 0.01 to 0.4 times greater than yields from conventional synthesis. Incorporating a nitro group in the structures of the sulfonium salts increased photoacid quantum yield, induced intersystem crossing and increased the efficiency of photoacid generation compounds.
