< Topic >While converting sterilization efficiency maximally, it shortens sterilization time, it offers the device which uses the sterilization method and its method in order to retrench the production cost of the sterilization device markedly.SolutionsAbout the primary vacuum chemical engineering where sterilization method of this invention, after accommodating suffering sterilization ones inside sterilization chamber 2 where it closes airtight, supplying ozone inside sterilization chamber 2, the primary sterilization process which sterilizes suffering sterilization ones and the primary disassembly process which disassembles the ozone inside sterilization chamber 2 and, discharges the gas inside sterilization chamber 2, decompresses inside sterilization chamber 2 and, supplying hydrogen peroxide inside sterilization chamber 2, the secondary sterilization process which sterilizes suffering sterilization ones and, the third sterilization process which supplies ozone inside sterilization chamber 2 and,The hydrogen peroxide inside sterilization chamber 2 and the secondary disassembly process which disassembles ozone and, it discharges the gas inside sterilization chamber 2, it includes with about the secondary vacuum chemical engineering which decompresses inside sterilization chamber 2.< Selective figure >Figure 2【課題】滅菌効率を最大化しながら、滅菌時間を短縮し、滅菌装置の製造コストを格段に節減するための滅菌方法及びその方法を用いた装置を提供する。【解決手段】本発明の滅菌方法は、密閉した滅菌チャンバー2内に被滅菌物を収容した後、滅菌チャンバー2内にオゾンを供給して被滅菌物を滅菌する第1次滅菌工程と、滅菌チャンバー2内のオゾンを分解する第1次分解工程と、滅菌チャンバー2内のガスを排出し、滅菌チャンバー2内を減圧する第1次真空化工程と、滅菌チャンバー2内に過酸化水素を供給して被滅菌物を滅菌する第2次滅菌工程と、滅菌チャンバー2内にオゾンを供給する第3次滅菌工程と、滅菌チャンバー2内の過酸化水素及びオゾンを分解する第2次分解工程と、滅菌チャンバー2内のガスを排出し、滅菌チャンバー2内を減圧する第2次真空化工程とを含む。【選択図】図2
