The present invention provides how fluorine-substituted Pyrazolopyrimidines or salt, preparation method new shown in formula (I) to (IX), and the method for treating and inhibit autoimmune disease or illness, heteroimmunity disease or illness, inflammatory disease and cancer or illness using these compounds and their preparation.本發明提供式(I)至(IX)所示的新的多氟取代的吡唑并嘧啶類化合物或鹽、其製備方法,以及使用這些化合物和它們的製劑來治療和抑制自身免疫性疾病或病症、異種免疫性疾病或病症、炎性疾病以及癌症或病症的方法。