#$%^&*AU2015221488A120150924.pdf#####ABSTRACT An erosion-resistant capillary chip for use with in an infusion pump that is made from a silicon substrate having a first surface that includes a micro groove etched therein and a glass plate laminated to the first surface. The glass plate covers the micro groove so that a micro fluid conduit is created. The glass plate includes an inlet bore that connects with the micro fluid conduit and the silicon substrate includes an outlet bore that connects with the micro fluid conduit so that a drug solution entering the inlet bore from the infusion pump may pass through the micro fluid conduit at a restricted flow rate to the outlet bore and thereafter to a target site of a patient. The micro groove includes a passivation layer made from silicon nitride or silicon carbide that protects the micro groove against erosion from passing fluids having high basic or high acidic pH levels. A method for making the capillary chip is disclosed, as well as an infusion pump incorporating the improved capillary chip.
