The measurement accuracy of a holding device equipped with a level sensor is improved. A holding device (1) has a storage portion (24) that defines a storage space (200) in which a chamber (500) to be held can be stored, and is disposed on a side facing away from the storage portion. A base member (2) in which a space (210) is formed, and a capacitance type level sensor (8) for measuring the level of the contents of the chamber, the level sensor in the internal space The first transmitting electrode (T1) and the first receiving electrode (R1) arranged facing the housing portion side, and the housing portion side from the direction different from the first transmitting electrode and the first receiving electrode in the internal space And the second transmission electrode (T2) disposed facing toward the receiving portion, and in the internal space, the second transmission electrode (T2) is disposed toward the housing portion from a direction different from the first transmission electrode, the first reception electrode, and the second transmission electrode. Second receiving electrode (R And having a) and. [Selection] Figure 11【課題】レベルセンサを搭載した保持装置の計測精度を向上させる。【解決手段】保持装置（１）は、保持対象のチャンバ（５００）を収容可能な収容空間（２００）を画成する収容部（２４）を有し、前記収容部に背向する側に内部空間（２１０）が形成されたベース部材（２）と、前記チャンバの内容物のレベルを計測する静電容量型のレベルセンサ（８）とを備え、前記レベルセンサは、前記内部空間において、前記収容部側を向いて配置された第１送信電極（Ｔ１）および第１受信電極（Ｒ１）と、前記内部空間において、前記第１送信電極および前記第１受信電極と異なる方向から前記収容部側を向いて配置された第２送信電極（Ｔ２）と、前記内部空間において、前記第１送信電極、前記第１受信電極、および前記第２送信電極と異なる方向から前記収容部側を向いて配置された第２受信電極（Ｒ２）とを有することを特徴とする。【選択図】図１１
